Integration of thick film permanent magnets for MEMS applications

Publication type: 
Peer-reviewed journal article
All authors: 
|Jackson, Nathan||Pedrosa, Javier||Bollero, Alberto||Mathewson, Alan||Olszewski, Oskar|
Theme: 
Microsystems
Abstract: 
This paper presents a method of integrating thick permanent magnetic films into a microfabrication process. An enhanced binding method consisting of a hybrid of Parylene N and Parylene C thin films were used in conjunction with various types of NdFeB powders to create the permanent magnet films. A systematic study of composite magnetic powders were developed using three different powders in order to control intrinsic coercivities (Hci) and remanence (Br) properties. In addition four types of dispensing methods were investigated. A liquid dispensing method demonstrated the highest fill factor (79%) for a 400µm thick film with an enhanced remanence value of 0.59 T. A range of remanence values from 0.2 to 0.59 T were developed by varying the concentration of multiple magnetic powders within the composite material. Validation of the integrated magnetic material into a MEMS device was demonstrated through a polymer on silicon cantilever structure.
Date accepted: 
28/05/2016
Publication date: 
29/07/2016
Funder: 
Ei Innovation Partnership IP 2013/0213
Journal abbreviation: 
J MICROELECTROMECH S
Journal/Book title: 
Journal of Microelectromechanical Systems
Publisher: 
IEEE
ISBN or ISSN: 
1057-7157
Volume: 
25
Issue Number: 
4
Page start: 
716
Page end: 
724
Year: 
2016
Document Controller: 
Oskar Olszewski
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